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Rikuta AOKI
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,138,666
Issue date
Nov 12, 2024
SCREEN Holdings Co., Ltd.
Toru Endo
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and method of machining tubular guard
Patent number
11,819,872
Issue date
Nov 21, 2023
SCREEN Holdings Co., Ltd.
Takahiro Yamaguchi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MACHINING TUBULAR GUARD
Publication number
20240042479
Publication date
Feb 8, 2024
SCREEN Holdings Co., Ltd.
Takahiro YAMAGUCHI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230256477
Publication date
Aug 17, 2023
SCREEN Holdings Co., Ltd.
Toru ENDO
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MACHINING TUBULAR GUARD
Publication number
20220258198
Publication date
Aug 18, 2022
SCREEN Holdings Co., Ltd.
Takahiro YAMAGUCHI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...