-
Radiation system
-
Patent number 11,984,236
-
Issue date May 14, 2024
-
ASML Netherlands B.V.
-
Han-Kwang Nienhuys
-
G02 - OPTICS
-
Radiation source
-
Patent number 11,140,765
-
Issue date Oct 5, 2021
-
ASML Netherlands B.V.
-
Rilpho Ludovicus Donker
-
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
-
Beam delivery apparatus and method
-
Patent number 10,580,545
-
Issue date Mar 3, 2020
-
ASML Netherlands B.V.
-
Vadim Yevgenyevich Banine
-
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
-
Radiation system
-
Patent number 10,580,546
-
Issue date Mar 3, 2020
-
ASML Netherlands B.V.
-
Han-Kwang Nienhuys
-
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
-
Lithographic method
-
Patent number 9,823,572
-
Issue date Nov 21, 2017
-
ASML Netherlands B.V.
-
Andrey Alexandrovich Nikipelov
-
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY