Rintaro Higuchi

Follow

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,935,736
- Issue date Mar 19, 2024
- Tokyo Electron Limited
- Rintaro Higuchi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,450,530
- Issue date Sep 20, 2022
- Tokyo Electron Limited
- Rintaro Higuchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,049,723
- Issue date Jun 29, 2021
- Tokyo Electron Limited
- Koukichi Hiroshiro
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240128307
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Rintaro HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210313171
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Rintaro HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210305053
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Rintaro Higuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200219730
- Publication date Jul 9, 2020
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS