Rintaro TAKAO

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus and method for transferring w...
- Patent number 11,621,185
- Issue date Apr 4, 2023
- Tokyo Electron Limited
- Rintaro Takao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and notification method
- Patent number 11,152,241
- Issue date Oct 19, 2021
- Tokyo Electron Limited
- Rintaro Takao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning thin film forming apparatus, thin film forming m...
- Patent number 9,920,424
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Ryota Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PR...
- Publication number 20240393768
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Rintaro TAKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR TRANSFERRING W...
- Publication number 20210287920
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Rintaro TAKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NOTIFICATION METHOD
- Publication number 20190139804
- Publication date May 9, 2019
- TOKYO ELECTRON LIMITED
- Rintaro Takao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING THIN FILM FORMING APPARATUS, THIN FILM FORMING M...
- Publication number 20140187053
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Ryota GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...