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Risa Yoshimoto
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Fukaya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Illumination optical system, exposure apparatus, device manufacturi...
Patent number
8,908,151
Issue date
Dec 9, 2014
Nikon Corporation
Kouji Muramatsu
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
Illumination optical system, exposure apparatus, device manufacturi...
Publication number
20090284727
Publication date
Nov 19, 2009
Nikon Corporation
Kouji Muramatsu
G02 - OPTICS