Ritsuo HORII

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Toyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,028,191
- Issue date May 12, 2015
- Hitachi Kokusai Electric Inc.
- Takeshi Yasui
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110311339
- Publication date Dec 22, 2011
- Hitachi Kokusai Electric Inc.
- Takeshi YASUI
- H01 - BASIC ELECTRIC ELEMENTS