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Ichikawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing apparatus
Patent number
6,942,541
Issue date
Sep 13, 2005
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
6,283,822
Issue date
Sep 4, 2001
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing cloth and polishing apparatus having such polishing cloth
Patent number
5,985,090
Issue date
Nov 16, 1999
Ebara Corporation
Ritsuo Kikuta
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
5,830,045
Issue date
Nov 3, 1998
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
5,716,264
Issue date
Feb 10, 1998
Ebara Corporation
Norio Kimura
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for polishing workpiece
Patent number
5,651,725
Issue date
Jul 29, 1997
Ebara Corporation
Ritsuo Kikuta
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Polishing apparatus
Publication number
20020009954
Publication date
Jan 24, 2002
Tetsuji Togawa
B24 - GRINDING POLISHING