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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,885,964
Issue date
Feb 6, 2018
ASML Netherlands B.V.
Jan Steven Christiaan Westerlaken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,913,228
Issue date
Dec 16, 2014
ASML Netherlands B.V.
Maurice Wijckmans
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Apparatus configured to position a workpiece
Patent number
7,679,720
Issue date
Mar 16, 2010
ASML Netherlands B.V.
Michel Pieter Dansberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method for manufacturing a device
Patent number
7,542,127
Issue date
Jun 2, 2009
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,359,032
Issue date
Apr 15, 2008
ASML Netherlands B.V.
Michel Pieter Dansberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
7,148,951
Issue date
Dec 12, 2006
ASML Netherlands B.V.
Nicolas Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20130107236
Publication date
May 2, 2013
ASML NETHERLANDS B.V.
Jan Steven Christiaan WESTERLAKEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus configured to position a workpiece
Publication number
20080174750
Publication date
Jul 24, 2008
ASML NETHERLANDS B.V.
Michel Pieter Dansberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070242245
Publication date
Oct 18, 2007
ASML NETHERLANDS B.V.
Maurice Wijckmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method for manufacturing a device
Publication number
20070139629
Publication date
Jun 21, 2007
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus
Publication number
20060087631
Publication date
Apr 27, 2006
ASML NETHERLANDS B.V.
Nicolas Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050083496
Publication date
Apr 21, 2005
ASML NETHERLANDS B.V.
Michel Pieter Dansberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY