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Rob Tousain
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Eindhoven, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,576,832
Issue date
Aug 18, 2009
ASML Netherlands B.V.
Ramidin Izair Kamidi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-adapting feedforward control tuning for motion system, and lit...
Patent number
7,170,581
Issue date
Jan 30, 2007
ASML Netherlands B.V.
Rob Tousain
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070258079
Publication date
Nov 8, 2007
ASML NETHERLANDS B.V.
Ramidin Izair Kamidi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Self-adapting feedforward control tuning for motion system, and lit...
Publication number
20060087632
Publication date
Apr 27, 2006
ASML NETHERLANDS B.V.
Rob Tousain
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY