Robbert Wilhelmus Elisabeth van de Kruijs

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Geldrop, NL

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Patents Grantslast 30 patents

Information Patent Grant
Method for producing a reflective optical element for EUV-lithography
- Patent number 9,733,580
- Issue date Aug 15, 2017
- Carl Zeiss SMT GmbH
- Alexey Kuznetzov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Reflective optical element for EUV lithography device
- Patent number 8,144,830
- Issue date Mar 27, 2012
- Carl Zeiss GmbH
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT COMPRISING A MULTILAYER COATING, AND OPTICAL ARRANG...
- Publication number 20160116648
- Publication date Apr 28, 2016
- Carl Zeiss SMT GMBH
- Robbert W. E. VAN DE KRUIJS
- G02 - OPTICS
Information Patent Application
METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR EUV-LITHOGRAPHY
- Publication number 20140193591
- Publication date Jul 10, 2014
- Carl Zeiss SMT GMBH
- Alexey KUZNETZOV
- B82 - NANO-TECHNOLOGY
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY DEVICE
- Publication number 20100027107
- Publication date Feb 4, 2010
- Carl Zeiss SMT AG
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multilayer system with protecting layer system and production method
- Publication number 20070281109
- Publication date Dec 6, 2007
- Carl Zeiss SMT AG
- Frederik Bijkerk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multilayer system with protecting layer system and production method
- Publication number 20040121134
- Publication date Jun 24, 2004
- Frederik Bijkerk
- G02 - OPTICS