Robert A. Chapman

Follow

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of purging and passivating a semiconductor processing chamber
- Patent number 5,759,287
- Issue date Jun 2, 1998
- Applied Materials, Inc.
- Aihua Chen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of purging and pumping vacuum chamber to ultra-high vacuum
- Patent number 5,536,330
- Issue date Jul 16, 1996
- Applied Materials, Inc.
- Aihua Chen
- C30 - CRYSTAL GROWTH