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Robert A. Comstock
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Pleasanton, CA, US
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last 30 patents
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Patent Grant
Monitoring changes in photomask defectivity
Patent number
9,892,503
Issue date
Feb 13, 2018
KLA-Tencor Corporation
Chun Guan
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Monitoring changes in photomask defectivity
Patent number
9,518,935
Issue date
Dec 13, 2016
KLA-Tencor Corporation
Chun Guan
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
MONITORING CHANGES IN PHOTOMASK DEFECTIVITY
Publication number
20170053395
Publication date
Feb 23, 2017
KLA-Tencor Corporation
Chun Guan
G01 - MEASURING TESTING
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Patent Application
MONITORING CHANGES IN PHOTOMASK DEFECTIVITY
Publication number
20150029498
Publication date
Jan 29, 2015
KLA-Tencor Corporation
Chun Guan
G01 - MEASURING TESTING