Robert A. Poltras

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Beverly, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafer holding robot end effecter vertical position determination in...
- Patent number 7,675,048
- Issue date Mar 9, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Brant S. Binns
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER HOLDING ROBOT END EFFECTER VERTICAL POSITION DETERMINATION IN...
- Publication number 20080218772
- Publication date Sep 11, 2008
- Brant S. Binns
- H01 - BASIC ELECTRIC ELEMENTS