Robert Anderson

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Newark, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning aluminum plasma chamber parts
- Patent number 8,545,639
- Issue date Oct 1, 2013
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS
- Publication number 20130104930
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...