Robert Andrews

Person

  • East Kingston, NH, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer holding pin

    • Patent number 6,452,195
    • Issue date Sep 17, 2002
    • Ibis Technology Corporation
    • Theodore H. Smick
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer holder for simox processing

    • Patent number 6,423,975
    • Issue date Jul 23, 2002
    • Ibis Technology, Inc.
    • Theodore H. Smick
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Arc inhibiting wafer holder assembly

    • Patent number 6,155,436
    • Issue date Dec 5, 2000
    • Ibis Technology Corporation
    • Theodore H. Smick
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    ROTATING SUBSTRATE SUPPORT AND METHODS OF USE

    • Publication number 20120291709
    • Publication date Nov 22, 2012
    • Applied Materials, Inc.
    • Jacob Smith
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ROTATING SUBSTRATE SUPPORT AND METHODS OF USE

    • Publication number 20100224130
    • Publication date Sep 9, 2010
    • Jacob Smith
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Rotating substrate support and methods of use

    • Publication number 20060281310
    • Publication date Dec 14, 2006
    • APPLIED MATERIALS, INC.
    • Jacob Smith
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...