Robert Antaki

Person

St. Luc, CA

People

Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating silicon-based MEMS devices
- Patent number 7,459,329
- Issue date Dec 2, 2008
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of advanced silicon-based MEMS devices
- Patent number 7,160,752
- Issue date Jan 9, 2007
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating silicon-based MEMS devices
- Patent number 7,144,750
- Issue date Dec 5, 2006
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of microstructures with vacuum-sealed cavity
- Patent number 6,902,656
- Issue date Jun 7, 2005
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of inspecting an anisotropic etch in a microstructure
- Patent number 6,770,213
- Issue date Aug 3, 2004
- Dalsa Semiconductor Inc.
- Robert Antaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of aligning a photolithographic mask to a crystal plane
- Patent number 6,686,214
- Issue date Feb 3, 2004
- Dalsa Semiconductor Inc.
- Robert Antaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Fabrication of advanced silicon-based MEMS devices
- Publication number 20060166403
- Publication date Jul 27, 2006
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of fabricating silicon-based MEMS devices
- Publication number 20060110895
- Publication date May 25, 2006
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING SILICON-BASED MEMS DEVICES
- Publication number 20050233492
- Publication date Oct 20, 2005
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of advanced silicon-based MEMS devices
- Publication number 20040157426
- Publication date Aug 12, 2004
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of microstructures with vacuum-sealed cavity
- Publication number 20030217915
- Publication date Nov 27, 2003
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of inspecting an anisotropic etch in a microstructure
- Publication number 20020088769
- Publication date Jul 11, 2002
- Robert Antaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of aligning a photolithographic mask to a crystal plane
- Publication number 20020072193
- Publication date Jun 13, 2002
- Robert Antaki
- H01 - BASIC ELECTRIC ELEMENTS

Robert Antaki

Person

Patents Grantslast 30 patents

Method of fabricating silicon-based MEMS devices

Fabrication of advanced silicon-based MEMS devices

Method of fabricating silicon-based MEMS devices

Fabrication of microstructures with vacuum-sealed cavity

Method of inspecting an anisotropic etch in a microstructure

Method of aligning a photolithographic mask to a crystal plane

Patents Applicationslast 30 patents

Fabrication of advanced silicon-based MEMS devices

Method of fabricating silicon-based MEMS devices

METHOD OF FABRICATING SILICON-BASED MEMS DEVICES

Fabrication of advanced silicon-based MEMS devices

Fabrication of microstructures with vacuum-sealed cavity

Method of inspecting an anisotropic etch in a microstructure

Method of aligning a photolithographic mask to a crystal plane