Robert B. Herring

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for hydrogen-rich selective oxidation
- Patent number 7,109,131
- Issue date Sep 19, 2006
- Aviza Technology, Inc.
- Robert B. Herring
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition wafer boat
- Patent number 4,548,159
- Issue date Oct 22, 1985
- Anicon, Inc.
- Derrick W. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Thermal processing system with cross flow injection system with rot...
- Publication number 20050121145
- Publication date Jun 9, 2005
- Dale R. Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for hydrogen-rich selective oxidation
- Publication number 20040137755
- Publication date Jul 15, 2004
- Thermal Acquisition Corp.
- Robert B. Herring
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-situ thermal chamber cleaning
- Publication number 20030216041
- Publication date Nov 20, 2003
- Robert B. Herring
- B08 - CLEANING
Information Patent Application
System and method for improved thin dielectric films
- Publication number 20030104707
- Publication date Jun 5, 2003
- Yoshihide Senzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...