Robert B. Turkot, Jr.

Person

Hillsboro, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning residues from semiconductor structures
- Patent number 8,017,568
- Issue date Sep 13, 2011
- Intel Corporation
- Shan C. Clark
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Reducing oxidation under a high K gate dielectric
- Patent number 7,387,927
- Issue date Jun 17, 2008
- Intel Corporation
- Robert B. Turkot, Jr.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filling small dimension vias using supercritical carbon dioxide
- Patent number 7,233,068
- Issue date Jun 19, 2007
- Intel Corporation
- Vijayakumar S. Ramachandrarao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching a thin metal layer
- Patent number 7,129,182
- Issue date Oct 31, 2006
- Intel Corporation
- Justin K. Brask
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching metal silicides and germanides
- Patent number 7,056,780
- Issue date Jun 6, 2006
- Intel Corporation
- Justin K. Brask
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making a semiconductor device with a high-k gate dielect...
- Patent number 7,045,428
- Issue date May 16, 2006
- Intel Corporation
- Justin K. Brask
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective etch process for making a semiconductor device having a h...
- Patent number 7,037,845
- Issue date May 2, 2006
- Intel Corporation
- Justin K. Brask
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Highly polar cleans for removal of residues from semiconductor stru...
- Patent number 7,022,655
- Issue date Apr 4, 2006
- Intel Corporation
- Justin K. Brask
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method for making a semiconductor device having a metal gate electrode
- Patent number 6,974,764
- Issue date Dec 13, 2005
- Intel Corporation
- Justin K. Brask
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acoustic streaming of condensate during sputtered metal vapor depos...
- Patent number 6,896,774
- Issue date May 24, 2005
- Intel Corporation
- Justin K. Brask
- H01 - BASIC ELECTRIC ELEMENTS

Robert B. Turkot, Jr.

Person

Patents Grantslast 30 patents

Cleaning residues from semiconductor structures

Reducing oxidation under a high K gate dielectric

Filling small dimension vias using supercritical carbon dioxide

Method for etching a thin metal layer

Etching metal silicides and germanides

Method for making a semiconductor device with a high-k gate dielect...

Selective etch process for making a semiconductor device having a h...

Highly polar cleans for removal of residues from semiconductor stru...

Method for making a semiconductor device having a metal gate electrode

Acoustic streaming of condensate during sputtered metal vapor depos...