Robert Brent Vopat

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Linear accelerator assembly including flexible high-voltage connection
- Patent number 12,279,359
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- David T. Blahnik
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Resonator, linear accelerator, and ion implanter having dielectric-...
- Patent number 12,185,451
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Robert B. Vopat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear accelerator coil including multiple fluid channels
- Patent number 11,985,756
- Issue date May 14, 2024
- Applied Materials, Inc.
- Robert B. Vopat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear accelerator assembly including flexible high-voltage connection
- Patent number 11,895,766
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- David T. Blahnik
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Resonator coil having an asymmetrical profile
- Patent number 11,710,617
- Issue date Jul 25, 2023
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch heating and cooling chamber or loadlock
- Patent number 11,315,806
- Issue date Apr 26, 2022
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Buffer chamber wafer heating mechanism and supporting robots
- Patent number 11,264,258
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonator coil having an asymmetrical profile
- Patent number 11,094,504
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure steam anneal processing apparatus
- Patent number 10,854,483
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic leveling process heater lift
- Patent number 10,854,491
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Jason M. Schaller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reticle processing system
- Patent number 10,831,112
- Issue date Nov 10, 2020
- Applied Materials, Inc.
- James Strassner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Buffer chamber wafer heating mechanism and supporting robots
- Patent number 10,699,930
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annealing system and method
- Patent number 10,643,867
- Issue date May 5, 2020
- Applied Materials, Inc.
- Jean Delmas
- F22 - STEAM GENERATION
Information Patent Grant
Susceptor position and rational apparatus and methods of use
- Patent number 10,597,779
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- William T. Weaver
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing systems including multi-position batch load lock a...
- Patent number 10,586,720
- Issue date Mar 10, 2020
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling and heating system
- Patent number 10,443,934
- Issue date Oct 15, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- F26 - DRYING
Information Patent Grant
Transfer chamber and method of using a transfer chamber
- Patent number 10,446,710
- Issue date Oct 15, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Aaron P. Webb
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate deposition systems, robot transfer apparatus, and methods...
- Patent number 10,427,303
- Issue date Oct 1, 2019
- Applied Materials, Inc.
- William T. Weaver
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Batch LED heating and cooling chamber or loadlock
- Patent number 10,283,379
- Issue date May 7, 2019
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing systems including multi-position batch load lock a...
- Patent number 10,256,125
- Issue date Apr 9, 2019
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle processing system
- Patent number 10,256,132
- Issue date Apr 9, 2019
- Varian Semiconductor Equipment Associates, Inc.
- James Strassner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic leveling process heater lift
- Patent number 10,249,525
- Issue date Apr 2, 2019
- Applied Materials, Inc.
- Jason M. Schaller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Buffer chamber wafer heating mechanism and supporting robot
- Patent number 10,103,046
- Issue date Oct 16, 2018
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for substrate heating during transport
- Patent number 9,899,242
- Issue date Feb 20, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Jason M. Schaller
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Electrostatic chuck with LED heating
- Patent number 9,728,430
- Issue date Aug 8, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-substrate thermal management apparatus
- Patent number 9,696,097
- Issue date Jul 4, 2017
- Applied Materials, Inc.
- Kallol Bera
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Workpiece handling system and methods of workpiece handling
- Patent number 9,694,989
- Issue date Jul 4, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jason M. Schaller
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
System and method for quick-swap of multiple substrates
- Patent number 9,669,552
- Issue date Jun 6, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Robert Brent Vopat
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Two-dimensional mass resolving slit mechanism for semiconductor pro...
- Patent number 9,496,117
- Issue date Nov 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-position batch load lock apparatus and systems and methods in...
- Patent number 9,378,994
- Issue date Jun 28, 2016
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION
- Publication number 20240179828
- Publication date May 30, 2024
- Applied Materials, Inc.
- David T. Blahnik
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RESONATOR, LINEAR ACCELERATOR, AND ION IMPLANTER HAVING DIELECTRIC-...
- Publication number 20240064888
- Publication date Feb 22, 2024
- Applied Materials, Inc.
- Robert B. Vopat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION
- Publication number 20230120769
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- David T. Blahnik
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LINEAR ACCELERATOR COIL INCLUDING MULTIPLE FLUID CHANNELS
- Publication number 20230119010
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Robert B. Vopat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE
- Publication number 20210343500
- Publication date Nov 4, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE
- Publication number 20210210307
- Publication date Jul 8, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT EXCHANGE ARRANGEMENT FOR LIGHT EMITTING DIODE LAMP MODULES
- Publication number 20200386392
- Publication date Dec 10, 2020
- Applied Materials, Inc.
- Robert B. Vopat
- F21 - LIGHTING
Information Patent Application
Single Layer PCB Circuit Layout For Uniform Radial LED Array
- Publication number 20200375027
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Jason M. Schaller
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Buffer Chamber Wafer Heating Mechanism And Supporting Robots
- Publication number 20200279763
- Publication date Sep 3, 2020
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing Chamber With Annealing Mini-Environment
- Publication number 20200135508
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- Michael Honan
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE DEPOSITION SYSTEMS, ROBOT TRANSFER APPARATUS, AND METHODS...
- Publication number 20190375105
- Publication date Dec 12, 2019
- Applied Materials, Inc.
- William T. Weaver
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Batch Heating and Cooling Chamber or Loadlock
- Publication number 20190259638
- Publication date Aug 22, 2019
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC LEVELING PROCESS HEATER LIFT
- Publication number 20190229004
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Jason M. SCHALLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...
- Publication number 20190198368
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reticle Processing System
- Publication number 20190189499
- Publication date Jun 20, 2019
- Varian Semiconductor Equipment Associates, Inc.
- James Strassner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH PRESSURE STEAM ANNEAL PROCESSING APPARATUS
- Publication number 20190148186
- Publication date May 16, 2019
- Applied Materials, Inc.
- Jason M. SCHALLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING SYSTEM AND METHOD
- Publication number 20190139793
- Publication date May 9, 2019
- Applied Materials, Inc.
- Jean DELMAS
- F22 - STEAM GENERATION
Information Patent Application
Buffer Chamber Wafer Heating Mechanism And Supporting Robots
- Publication number 20190019708
- Publication date Jan 17, 2019
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC LEVELING PROCESS HEATER LIFT
- Publication number 20180096874
- Publication date Apr 5, 2018
- Applied Materials, Inc.
- Jason M. SCHALLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Compatible LED Substrate Heater
- Publication number 20160379854
- Publication date Dec 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Robert Brent Vopat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck With LED Heating
- Publication number 20160379853
- Publication date Dec 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Susceptor Position and Rotation Apparatus and Methods of Use
- Publication number 20160355927
- Publication date Dec 8, 2016
- Applied Materials, Inc.
- William T. Weaver
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Handling And Heating System
- Publication number 20160329458
- Publication date Nov 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Buffer Chamber Wafer Heating Mechanism And Supporting Robot
- Publication number 20160307782
- Publication date Oct 20, 2016
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device And Method For Substrate Heating During Transport
- Publication number 20160293458
- Publication date Oct 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Jason M. Schaller
- F21 - LIGHTING
Information Patent Application
WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...
- Publication number 20160284578
- Publication date Sep 29, 2016
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Batch Heating and Cooling Chamber or Loadlock
- Publication number 20160218028
- Publication date Jul 28, 2016
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-SUBSTRATE THERMAL MANAGEMENT APPARATUS
- Publication number 20160033205
- Publication date Feb 4, 2016
- Applied Materials, Inc.
- KALLOL BERA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Electrostatic Charge Removal For Solar Cell Grippers
- Publication number 20150249030
- Publication date Sep 3, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Jason Schaller
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TWO-DIMENSIONAL MASS RESOLVING SLIT MECHANISM FOR SEMICONDUCTOR PRO...
- Publication number 20150206701
- Publication date Jul 23, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS

Robert Brent Vopat

Person

Patents Grantslast 30 patents

Linear accelerator assembly including flexible high-voltage connection

Resonator, linear accelerator, and ion implanter having dielectric-...

Linear accelerator coil including multiple fluid channels

Linear accelerator assembly including flexible high-voltage connection

Resonator coil having an asymmetrical profile

Batch heating and cooling chamber or loadlock

Buffer chamber wafer heating mechanism and supporting robots

Resonator coil having an asymmetrical profile

High pressure steam anneal processing apparatus

Dynamic leveling process heater lift

Reticle processing system

Buffer chamber wafer heating mechanism and supporting robots

Annealing system and method

Susceptor position and rational apparatus and methods of use

Wafer processing systems including multi-position batch load lock a...

Substrate handling and heating system

Transfer chamber and method of using a transfer chamber

Substrate deposition systems, robot transfer apparatus, and methods...

Batch LED heating and cooling chamber or loadlock

Wafer processing systems including multi-position batch load lock a...

Reticle processing system

Dynamic leveling process heater lift

Buffer chamber wafer heating mechanism and supporting robot

Device and method for substrate heating during transport

Electrostatic chuck with LED heating

Multi-substrate thermal management apparatus

Workpiece handling system and methods of workpiece handling

System and method for quick-swap of multiple substrates

Two-dimensional mass resolving slit mechanism for semiconductor pro...

Multi-position batch load lock apparatus and systems and methods in...

Patents Applicationslast 30 patents

LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION

RESONATOR, LINEAR ACCELERATOR, AND ION IMPLANTER HAVING DIELECTRIC-...

LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION

LINEAR ACCELERATOR COIL INCLUDING MULTIPLE FLUID CHANNELS

RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE

RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE

HEAT EXCHANGE ARRANGEMENT FOR LIGHT EMITTING DIODE LAMP MODULES

Single Layer PCB Circuit Layout For Uniform Radial LED Array

Buffer Chamber Wafer Heating Mechanism And Supporting Robots

Processing Chamber With Annealing Mini-Environment

SUBSTRATE DEPOSITION SYSTEMS, ROBOT TRANSFER APPARATUS, AND METHODS...

Batch Heating and Cooling Chamber or Loadlock

DYNAMIC LEVELING PROCESS HEATER LIFT

WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...

Reticle Processing System

HIGH PRESSURE STEAM ANNEAL PROCESSING APPARATUS

ANNEALING SYSTEM AND METHOD

Buffer Chamber Wafer Heating Mechanism And Supporting Robots

DYNAMIC LEVELING PROCESS HEATER LIFT

Vacuum Compatible LED Substrate Heater

Electrostatic Chuck With LED Heating

Susceptor Position and Rotation Apparatus and Methods of Use

Substrate Handling And Heating System

Buffer Chamber Wafer Heating Mechanism And Supporting Robot

Device And Method For Substrate Heating During Transport

WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...

Batch Heating and Cooling Chamber or Loadlock

MULTI-SUBSTRATE THERMAL MANAGEMENT APPARATUS

Electrostatic Charge Removal For Solar Cell Grippers

TWO-DIMENSIONAL MASS RESOLVING SLIT MECHANISM FOR SEMICONDUCTOR PRO...