Robert C. Amme

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Littleton, CO, US

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Patents Grantslast 30 patents

Information Patent Grant
Photon-enhanced neutral beam etcher and cleaner
- Patent number 5,897,844
- Issue date Apr 27, 1999
- Colorado Seminary
- Robert C. Amme
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Processing substrates with a photon-enhanced neutral beam
- Patent number 5,637,188
- Issue date Jun 10, 1997
- Colorado Seminary
- Robert C. Amme
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR