Robert C. Lindberg

Person

Rockport, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Crucible design for liquid metal in an ion source
- Patent number 11,854,760
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable thickness ion source extraction plate
- Patent number 11,810,746
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extended cathode and repeller life by active management of halogen...
- Patent number 11,664,183
- Issue date May 30, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic filter providing reduced particle generation
- Patent number 11,437,215
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped electrode
- Patent number D956005
- Issue date Jun 28, 2022
- Applied Materials, Inc.
- Robert C. Lindberg
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Ion beam quality control using a movable mass resolving device
- Patent number 11,049,691
- Issue date Jun 29, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive beam optics for reducing particles in ion implanter
- Patent number 10,714,301
- Issue date Jul 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive beam optic containing internal heating element
- Patent number 10,504,682
- Issue date Dec 10, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Curved post scan electrode
- Patent number 9,905,396
- Issue date Feb 27, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and a method for in-situ cleaning thereof
- Patent number 9,142,379
- Issue date Sep 22, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus to control an ion beam
- Patent number 9,029,811
- Issue date May 12, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual stage scanner for ion beam control
- Patent number 8,993,980
- Issue date Mar 31, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for ion implanting a target
- Patent number 8,937,003
- Issue date Jan 20, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Alexander S. Perel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual mode ion implanter
- Patent number 8,884,244
- Issue date Nov 11, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and a method for in-situ cleaning thereof
- Patent number 8,809,800
- Issue date Aug 19, 2014
- Varian Semicoductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling an asymmetric electrostatic le...
- Patent number 8,519,353
- Issue date Aug 27, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery system for an ion source
- Patent number 8,003,954
- Issue date Aug 23, 2011
- Varian Semiconductor Equipment Associates, Inc.
- John Slocum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for shaping a ribbon-shaped ion beam
- Patent number 7,675,047
- Issue date Mar 9, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...
- Publication number 20230386785
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Variable Thickness Ion Source Extraction Plate
- Publication number 20230080083
- Publication date Mar 16, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Crucible Design For Liquid Metal In An Ion Source
- Publication number 20220406554
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extended Cathode And Repeller Life By Active Management Of Halogen...
- Publication number 20220359147
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC FILTER PROVIDING REDUCED PARTICLE GENERATION
- Publication number 20210183609
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC FILTER WITH SHAPED ELECTRODES
- Publication number 20210090845
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Robert C. Lindberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDUCTIVE BEAM OPTIC CONTAINING INTERNAL HEATING ELEMENT
- Publication number 20190259560
- Publication date Aug 22, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Quality Control Using A Movable Mass Resolving Device
- Publication number 20190198292
- Publication date Jun 27, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL STAGE SCANNER FOR ION BEAM CONTROL
- Publication number 20150108361
- Publication date Apr 23, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS TO CONTROL AN ION BEAM
- Publication number 20150108362
- Publication date Apr 23, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source and a method for in-situ cleaning thereof
- Publication number 20140319369
- Publication date Oct 30, 2014
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE FOR ION IMPLANTING A TARGET
- Publication number 20130072008
- Publication date Mar 21, 2013
- Alexander S. Perel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING AN ELECTROSTATIC LENS ABOUT A...
- Publication number 20120168637
- Publication date Jul 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source and a Method for In-Situ Cleaning Thereof
- Publication number 20100024841
- Publication date Feb 4, 2010
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEM FOR AN ION SOURCE
- Publication number 20090289197
- Publication date Nov 26, 2009
- Varian Semiconductor Equipment Associates, Inc.
- John SLOCUM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR SHAPING AN ION BEAM
- Publication number 20090121149
- Publication date May 14, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for Shaping a Ribbon-Shaped Ion Beam
- Publication number 20070108390
- Publication date May 17, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS

Robert C. Lindberg

Person

Patents Grantslast 30 patents

Crucible design for liquid metal in an ion source

Variable thickness ion source extraction plate

Extended cathode and repeller life by active management of halogen...

Electrostatic filter providing reduced particle generation

Shaped electrode

Ion beam quality control using a movable mass resolving device

Conductive beam optics for reducing particles in ion implanter

Conductive beam optic containing internal heating element

Curved post scan electrode

Ion source and a method for in-situ cleaning thereof

Apparatus to control an ion beam

Dual stage scanner for ion beam control

Technique for ion implanting a target

Dual mode ion implanter

Ion source and a method for in-situ cleaning thereof

Method and apparatus for controlling an asymmetric electrostatic le...

Gas delivery system for an ion source

Technique for shaping a ribbon-shaped ion beam

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...

Variable Thickness Ion Source Extraction Plate

Crucible Design For Liquid Metal In An Ion Source

Extended Cathode And Repeller Life By Active Management Of Halogen...

ELECTROSTATIC FILTER PROVIDING REDUCED PARTICLE GENERATION

ELECTROSTATIC FILTER WITH SHAPED ELECTRODES

CONDUCTIVE BEAM OPTIC CONTAINING INTERNAL HEATING ELEMENT

Ion Beam Quality Control Using A Movable Mass Resolving Device

DUAL STAGE SCANNER FOR ION BEAM CONTROL

APPARATUS TO CONTROL AN ION BEAM

Ion source and a method for in-situ cleaning thereof

TECHNIQUE FOR ION IMPLANTING A TARGET

METHOD AND APPARATUS FOR CONTROLLING AN ELECTROSTATIC LENS ABOUT A...

Ion Source and a Method for In-Situ Cleaning Thereof

GAS DELIVERY SYSTEM FOR AN ION SOURCE

TECHNIQUES FOR SHAPING AN ION BEAM

Technique for Shaping a Ribbon-Shaped Ion Beam