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Substrate processing apparatus
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Patent number 12,206,342
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Issue date Jan 21, 2025
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BROOKS AUTOMATION US, LLC
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Jairo T. Moura
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate transport apparatus
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Patent number 12,162,698
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Issue date Dec 10, 2024
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BROOKS AUTOMATION US, LLC
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Daniel Babbs
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate transport
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Patent number 11,978,648
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Issue date May 7, 2024
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BROOKS AUTOMATION US, LLC
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Daniel Babbs
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate transport
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Patent number 11,658,051
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Issue date May 23, 2023
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BROOKS AUTOMATION US, LLC
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Daniel Babbs
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H01 - BASIC ELECTRIC ELEMENTS
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Side opening unified pod
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Patent number 11,201,070
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Issue date Dec 14, 2021
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Brooks Automation, Inc.
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Daniel Babbs
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate transport
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Patent number 11,121,015
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Issue date Sep 14, 2021
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Brooks Automation, Inc.
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Daniel Babbs
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate transport
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Patent number 10,395,959
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Issue date Aug 27, 2019
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Brooks Automation, Inc.
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Daniel Babbs
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H01 - BASIC ELECTRIC ELEMENTS
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Side opening unified pod
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Patent number 9,978,623
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Issue date May 22, 2018
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Brooks Automation, Inc.
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Daniel Babbs
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H01 - BASIC ELECTRIC ELEMENTS
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Side opening unified pod
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Patent number 9,105,673
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Issue date Aug 11, 2015
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Brooks Automation, Inc.
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Daniel Babbs
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H01 - BASIC ELECTRIC ELEMENTS
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Transport system
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Patent number 8,827,618
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Issue date Sep 9, 2014
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Brooks Automation, Inc.
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Daniel Babbs
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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