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Robert C. Pack
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Morgan Hill, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for dimensional uniformity using charged particle...
Patent number
10,431,422
Issue date
Oct 1, 2019
D2S, Inc.
Akira Fujimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, system and program product for identifying anomalies in int...
Patent number
10,055,535
Issue date
Aug 21, 2018
GLOBALFOUNDRIES Inc.
Piyush Pathak
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for dimensional uniformity using charged particle...
Patent number
9,859,100
Issue date
Jan 2, 2018
D2S, Inc.
Akira Fujimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for dimensional uniformity using charged particle...
Patent number
9,343,267
Issue date
May 17, 2016
D2S, Inc.
Akira Fujimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for critical dimension uniformity using charged p...
Patent number
9,038,003
Issue date
May 19, 2015
D2S, Inc.
Ryan Pearman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for dimensional uniformity using charged particle...
Patent number
8,959,463
Issue date
Feb 17, 2015
D2S, Inc.
Akira Fujimura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for forming high precision patterns using charged...
Patent number
8,745,549
Issue date
Jun 3, 2014
D2S, Inc.
Akira Fujimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Modeling and simulating the impact of imperfectly patterned via arr...
Patent number
8,468,482
Issue date
Jun 18, 2013
Worldwide Pro Ltd.
Robert C. Pack
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Hierarchical variation analysis of integrated circuits
Patent number
8,453,102
Issue date
May 28, 2013
Worldwide Pro Ltd.
Robert C. Pack
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND MECHANISMS FOR PROCESS RECIPE OPTIMIZATION
Publication number
20230135102
Publication date
May 4, 2023
Applied Materials, Inc.
Robert C. Pack
G05 - CONTROLLING REGULATING
Information
Patent Application
RECIPE OPTIMIZATION THROUGH MACHINE LEARNING
Publication number
20220198333
Publication date
Jun 23, 2022
Applied Materials, Inc.
Robert Charles Pack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND SYSTEM FOR DIMENSIONAL UNIFORMITY USING CHARGED PARTICLE...
Publication number
20180108513
Publication date
Apr 19, 2018
D2S, INC.
Akira Fujimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, SYSTEM AND PROGRAM PRODUCT FOR IDENTIFYING ANOMALIES IN INT...
Publication number
20180089357
Publication date
Mar 29, 2018
GLOBALFOUNDRIES INC.
Piyush PATHAK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND SYSTEM FOR DIMENSIONAL UNIFORMITY USING CHARGED PARTICLE...
Publication number
20160260581
Publication date
Sep 8, 2016
D2S, INC.
Akira Fujimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR DIMENSIONAL UNIFORMITY USING CHARGED PARTICLE...
Publication number
20140359542
Publication date
Dec 4, 2014
Akira Fujimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR DIMENSIONAL UNIFORMITY USING CHARGED PARTICLE...
Publication number
20140129996
Publication date
May 8, 2014
D2S, INC.
Akira Fujimura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND SYSTEM FOR DIMENSIONAL UNIFORMITY USING CHARGED PARTICLE...
Publication number
20140129997
Publication date
May 8, 2014
D2S, INC.
Akira Fujimura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND SYSTEM FOR CRITICAL DIMENSION UNIFORMITY USING CHARGED P...
Publication number
20130283216
Publication date
Oct 24, 2013
D2S, INC.
Ryan Pearman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND SYSTEM FOR FORMING HIGH PRECISION PATTERNS USING CHARGED...
Publication number
20130205264
Publication date
Aug 8, 2013
D2S, INC.
Akira Fujimura
H01 - BASIC ELECTRIC ELEMENTS