Robert C. Rowan, Jr.

Follow

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum-processing chamber-shield and multi-chamber pumping method
- Patent number 7,001,491
- Issue date Feb 21, 2006
- Tokyo Electron Limited
- Michael J. Lombardi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...