Robert Chen

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El Sobrante, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for producing flat wafer chucks
- Patent number 6,660,975
- Issue date Dec 9, 2003
- Matrix Integrated Systems, Inc.
- Albert Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for producing flat wafer chucks
- Publication number 20020195440
- Publication date Dec 26, 2002
- Albert Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and structure for producing flat wafer chucks
- Publication number 20010035403
- Publication date Nov 1, 2001
- Albert Wang
- H01 - BASIC ELECTRIC ELEMENTS