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ROBERT CHEN
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Internal balanced coil for inductively coupled high density plasma...
Patent number
7,789,993
Issue date
Sep 7, 2010
Applied Materials, Inc.
Robert Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two-piece dome with separate RF coils for inductively coupled plasm...
Patent number
7,651,587
Issue date
Jan 26, 2010
Applied Materials, Inc.
Siqing Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High stress diamond like carbon film
Patent number
7,629,271
Issue date
Dec 8, 2009
Applied Materials, Inc.
Jing Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Internal balanced coil for inductively coupled high density plasma...
Patent number
7,572,647
Issue date
Aug 11, 2009
Applied Materials, Inc.
Robert Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA...
Publication number
20080185284
Publication date
Aug 7, 2008
Applied Materials, Inc.
Robert Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA...
Publication number
20080188090
Publication date
Aug 7, 2008
Applied Materials, Inc.
ROBERT CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA...
Publication number
20080188087
Publication date
Aug 7, 2008
Applied Materials, Inc.
ROBERT CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Two-piece dome with separate RF coils for inductively coupled plasm...
Publication number
20070037397
Publication date
Feb 15, 2007
Applied Materials, Inc.
Siqing Lu
H01 - BASIC ELECTRIC ELEMENTS