Robert D. Greenway

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate support with gas feed-through and method
- Patent number 6,605,177
- Issue date Aug 12, 2003
- Applied Material, Inc.
- Richard R. Mett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber having improved gas feed-through and method
- Patent number 6,500,299
- Issue date Dec 31, 2002
- Applied Materials Inc.
- Richard R. Mett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Impedance matching network
- Patent number 5,952,896
- Issue date Sep 14, 1999
- Applied Materials, Inc.
- Richard R. Mett
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
Substrate support with gas feed-through and method
- Publication number 20030037883
- Publication date Feb 27, 2003
- APPLIED MATERIALS, INC.
- Richard R. Mett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...