Robert D. Mailho

Person

Sonora, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for epitaxially depositing films on a semicondu...
- Patent number 6,902,622
- Issue date Jun 7, 2005
- Mattson Technology, Inc.
- Kristian E. Johnsgard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for epitaxial processing of a semiconductor sub...
- Patent number 6,436,796
- Issue date Aug 20, 2002
- Mattson Technology, Inc.
- Robert D. Mailho
- C30 - CRYSTAL GROWTH
Information Patent Grant
Susceptor hold-down mechanism
- Patent number 6,118,100
- Issue date Sep 12, 2000
- Mattson Technology, Inc.
- Robert D. Mailho
- C30 - CRYSTAL GROWTH
Information Patent Grant
Gas injection system for CVD reactors
- Patent number 6,113,984
- Issue date Sep 5, 2000
- Concept Systems Design, Inc.
- Joseph H. MacLeish
- C30 - CRYSTAL GROWTH
Information Patent Grant
Zone heating system with feedback control
- Patent number 6,031,211
- Issue date Feb 29, 2000
- Concept Systems Design, Inc.
- Robert D. Mailho
- C30 - CRYSTAL GROWTH
Information Patent Grant
CVD reactor having heated process chamber within isolation chamber
- Patent number 5,891,251
- Issue date Apr 6, 1999
- Joseph H. MacLeish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injection system for CVD reactors
- Patent number 5,653,808
- Issue date Aug 5, 1997
- Joseph H. MacLeish
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Systems and methods for epitaxially depositing films on a semicondu...
- Publication number 20050133159
- Publication date Jun 23, 2005
- Kristian E. Johnsgard
- C30 - CRYSTAL GROWTH
Information Patent Application
Systems and methods for epitaxially depositing films on a semicondu...
- Publication number 20030124820
- Publication date Jul 3, 2003
- Kristian E. Johnsgard
- C30 - CRYSTAL GROWTH

Robert D. Mailho

Person

Patents Grantslast 30 patents

Systems and methods for epitaxially depositing films on a semicondu...

Systems and methods for epitaxial processing of a semiconductor sub...

Susceptor hold-down mechanism

Gas injection system for CVD reactors

Zone heating system with feedback control

CVD reactor having heated process chamber within isolation chamber

Gas injection system for CVD reactors

Patents Applicationslast 30 patents

Systems and methods for epitaxially depositing films on a semicondu...

Systems and methods for epitaxially depositing films on a semicondu...