Robert D. Rathmell

Person

Murphy, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Heated electrostatic chuck including mechanical clamp capability at...
- Patent number 8,941,968
- Issue date Jan 27, 2015
- Axcelis Technologies, Inc.
- Perry J. I. Justesen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated annulus chuck
- Patent number 8,797,706
- Issue date Aug 5, 2014
- Axcelis Technologies, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlled dose ion implantation
- Patent number 7,982,195
- Issue date Jul 19, 2011
- Axcelis Technologies, Inc.
- Aditya Agarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for magnetic scanning and correction of an ion beam
- Patent number 7,615,763
- Issue date Nov 10, 2009
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Means to establish orientation of ion beam to wafer and correct ang...
- Patent number 7,361,914
- Issue date Apr 22, 2008
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam current stabilization utilizing gas feed control loop
- Patent number 7,361,915
- Issue date Apr 22, 2008
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation beam angle calibration
- Patent number 7,329,882
- Issue date Feb 12, 2008
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic lens for ion beams
- Patent number 7,112,809
- Issue date Sep 26, 2006
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dose cup located near bend in final energy filter of serial implant...
- Patent number 7,102,146
- Issue date Sep 5, 2006
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Biased electrostatic deflector
- Patent number 7,022,984
- Issue date Apr 4, 2006
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for measurement of beam angle and divergence
- Patent number 6,989,545
- Issue date Jan 24, 2006
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid magnetic/electrostatic deflector for ion implantation systems
- Patent number 6,881,966
- Issue date Apr 19, 2005
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deflecting acceleration/deceleration gap
- Patent number 6,777,696
- Issue date Aug 17, 2004
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic parallelizing lens for ion beams
- Patent number 6,774,377
- Issue date Aug 10, 2004
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic trap for particles entrained in an ion beam
- Patent number 6,534,775
- Issue date Mar 18, 2003
- Axcelis Technologies, Inc.
- Eric R. Harrington
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for removing contaminant particles relative to an...
- Patent number 6,476,399
- Issue date Nov 5, 2002
- Axcelis Technologies, Inc.
- Eric R. Harrington
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEATED ANNULUS CHUCK
- Publication number 20110299218
- Publication date Dec 8, 2011
- Axcelis Technologies, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT...
- Publication number 20110299217
- Publication date Dec 8, 2011
- Axcelis Technologies, Inc.
- Perry J.I. Justesen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System for magnetic scanning and correction of an ion beam
- Publication number 20080067436
- Publication date Mar 20, 2008
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation beam angle calibration
- Publication number 20070120074
- Publication date May 31, 2007
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Means to establish orientation of ion beam to wafer and correct ang...
- Publication number 20070120067
- Publication date May 31, 2007
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam current stabilization utilizing gas feed control loop
- Publication number 20070120075
- Publication date May 31, 2007
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlled dose ion implantation
- Publication number 20060057303
- Publication date Mar 16, 2006
- Axcelis Technologies, Inc.
- Aditya Agarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnet for scanning ion beams
- Publication number 20060017010
- Publication date Jan 26, 2006
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
DEVICE AND METHOD FOR MEASUREMENT OF BEAM ANGLE AND DIVERGENCE NORM...
- Publication number 20060006346
- Publication date Jan 12, 2006
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dose cup located near bend in final energy filter of serial implant...
- Publication number 20050269526
- Publication date Dec 8, 2005
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic lens for ion beams
- Publication number 20040262542
- Publication date Dec 30, 2004
- Axcelis Technologies, Inc.
- Robert D. Rathmell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID MAGNETIC/ELECTROSTATIC DEFLECTOR FOR ION IMPLANTATION SYSTEMS
- Publication number 20040227105
- Publication date Nov 18, 2004
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS

Robert D. Rathmell

Person

Patents Grantslast 30 patents

Heated electrostatic chuck including mechanical clamp capability at...

Heated annulus chuck

Controlled dose ion implantation

System for magnetic scanning and correction of an ion beam

Means to establish orientation of ion beam to wafer and correct ang...

Beam current stabilization utilizing gas feed control loop

Ion implantation beam angle calibration

Electrostatic lens for ion beams

Dose cup located near bend in final energy filter of serial implant...

Biased electrostatic deflector

Device and method for measurement of beam angle and divergence

Hybrid magnetic/electrostatic deflector for ion implantation systems

Deflecting acceleration/deceleration gap

Electrostatic parallelizing lens for ion beams

Electrostatic trap for particles entrained in an ion beam

System and method for removing contaminant particles relative to an...

Patents Applicationslast 30 patents

HEATED ANNULUS CHUCK

HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT...

System for magnetic scanning and correction of an ion beam

Ion implantation beam angle calibration

Means to establish orientation of ion beam to wafer and correct ang...

Beam current stabilization utilizing gas feed control loop

Controlled dose ion implantation

Magnet for scanning ion beams

DEVICE AND METHOD FOR MEASUREMENT OF BEAM ANGLE AND DIVERGENCE NORM...

Dose cup located near bend in final energy filter of serial implant...

Electrostatic lens for ion beams

HYBRID MAGNETIC/ELECTROSTATIC DEFLECTOR FOR ION IMPLANTATION SYSTEMS