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Robert Douglas Mohondro
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Sykesville, MD, US
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Patents Grants
last 30 patents
Information
Patent Grant
Process for optically erasing charge buildup during fabrication of...
Patent number
6,803,319
Issue date
Oct 12, 2004
Axcelis Technologies, Inc.
Alan C. Janos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for reducing edge roughness in patterned photoresist
Patent number
6,709,807
Issue date
Mar 23, 2004
Axcelis Technologies, Inc.
John S. Hallock
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Process for optically erasing charge buildup during fabrication of...
Patent number
6,605,484
Issue date
Aug 12, 2003
Axcelis Technologies, Inc.
Alan C. Janos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for reducing edge roughness in patterned photoresist
Patent number
6,582,891
Issue date
Jun 24, 2003
Axcelis Technologies, Inc.
John S. Hallock
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
UV assisted chemical modification of photoresist
Patent number
6,503,693
Issue date
Jan 7, 2003
Axcelis Technologies, Inc.
Robert Douglas Mohondro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Treatment of dielectric materials
Patent number
6,417,115
Issue date
Jul 9, 2002
Axeclis Technologies, Inc.
Terrence Alair McDevitt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of stripping photoresist using re-coating material
Patent number
6,406,836
Issue date
Jun 18, 2002
Axcelis Technologies, Inc.
Robert Mohondro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Controlled amine poisoning for reduced shrinkage of features formed...
Patent number
6,214,524
Issue date
Apr 10, 2001
Fusion Systems Corporation
Robert Douglas Mohondro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Controlled shrinkage of photoresist
Patent number
6,117,622
Issue date
Sep 12, 2000
Fusion Systems Corporation
Jeffrey Allan Eisele
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Controlled amine poisoning for reduced shrinkage of features formed...
Patent number
6,057,084
Issue date
May 2, 2000
Fusion Systems Corporation
Robert Douglas Mohondro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
PROCESS FOR OPTICALLY ERASING CHARGE BUILDUP DURING FABRICATION OF...
Publication number
20030180976
Publication date
Sep 25, 2003
Alan C. Janos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for reducing edge roughness in patterned photoresist
Publication number
20030049571
Publication date
Mar 13, 2003
Axcelis Technologies, Inc.
John S. Hallock
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC