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Multiple loadlock system
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Patent number 6,506,693
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Issue date Jan 14, 2003
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Applied Materials, Inc.
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Roger V. Heyder
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H01 - BASIC ELECTRIC ELEMENTS
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Multiple loadlock system
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Patent number 6,450,750
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Issue date Sep 17, 2002
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Applied Materials, Inc.
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Roger V. Heyder
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H01 - BASIC ELECTRIC ELEMENTS
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Multiple loadlock system
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Patent number 6,034,000
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Issue date Mar 7, 2000
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Applied Materials, Inc.
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Roger V. Heyder
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H01 - BASIC ELECTRIC ELEMENTS
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Apparatus for full wafer deposition
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Patent number 5,803,977
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Issue date Sep 8, 1998
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Applied Materials, Inc.
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Avi Tepman
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Low thermal expansion clamping mechanism
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Patent number 5,460,703
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Issue date Oct 24, 1995
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Applied Materials, Inc.
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Jaim Nulman
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...