Robert E. Higashi

Person

Shorewood, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Thermopile-based flow sensing device
- Patent number 12,078,519
- Issue date Sep 3, 2024
- Honeywell International Inc.
- Robert Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Through silicon via fabrication
- Patent number 11,776,849
- Issue date Oct 3, 2023
- Quantinuum LLC
- Robert Edward Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermopile-based flow sensing device
- Patent number 11,747,184
- Issue date Sep 5, 2023
- Honeywell International Inc.
- Robert Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Through silicon via fabrication
- Patent number 11,430,695
- Issue date Aug 30, 2022
- Quantinuum LLC
- Robert Edward Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact gas sensor including a MEMS element having capillaries to f...
- Patent number 11,268,928
- Issue date Mar 8, 2022
- Honeywell International Inc.
- Richard Wade
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrochemical gas sensor constructed with MEMS fabrication techno...
- Patent number 10,996,190
- Issue date May 4, 2021
- Honeywell International Inc.
- Scott Edward Beck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Through silicon via fabrication
- Patent number 10,867,855
- Issue date Dec 15, 2020
- Honeywell International Inc.
- Robert E. Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermophile-based flow sensing device
- Patent number 10,775,217
- Issue date Sep 15, 2020
- Honeywell International Inc.
- Robert Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Airflow sensor with gas composition correction
- Patent number 10,634,535
- Issue date Apr 28, 2020
- Honeywell International Inc.
- Robert Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Robust sensing film for fire gases
- Patent number 10,497,486
- Issue date Dec 3, 2019
- Honeywell International Inc.
- Robert E. Higashi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Airflow sensor with thermal conductivity and diffusivity sensing
- Patent number 10,345,130
- Issue date Jul 9, 2019
- Honeywell International Inc.
- Ian Bentley
- G01 - MEASURING TESTING
Information Patent Grant
Sensor temperature sensing device
- Patent number 9,574,947
- Issue date Feb 21, 2017
- Honeywell International Inc.
- Barrett E. Cole
- G01 - MEASURING TESTING
Information Patent Grant
Infrared imager
- Patent number 9,228,903
- Issue date Jan 5, 2016
- Honeywell International Inc.
- Barrett E. Cole
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Thermal conductivity detectors
- Patent number 9,128,028
- Issue date Sep 8, 2015
- Honeywell International Inc.
- Adam D. McBrady
- G01 - MEASURING TESTING
Information Patent Grant
Sensor temperature sensing device
- Patent number 8,651,737
- Issue date Feb 18, 2014
- Honeywell International Inc.
- Barrett E. Cole
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for etching a diaphragm pressure sensor
- Patent number 8,535,967
- Issue date Sep 17, 2013
- Honeywell International Inc.
- Robert Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Method for wafer bonding using gold and indium
- Patent number 8,513,091
- Issue date Aug 20, 2013
- Honeywell International Inc.
- Robert Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High performance detection pixel
- Patent number 8,314,769
- Issue date Nov 20, 2012
- Honeywell International Inc.
- Barrett E. Cole
- G01 - MEASURING TESTING
Information Patent Grant
Integration of MEMS and CMOS devices on a chip
- Patent number 8,299,506
- Issue date Oct 30, 2012
- Honeywell International Inc.
- Andy Peczalski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro discharge device capable of low voltage discharges in a varie...
- Patent number 8,196,449
- Issue date Jun 12, 2012
- Honeywell International Inc.
- Adam Dewey McBrady
- G01 - MEASURING TESTING
Information Patent Grant
High reflectance terahertz mirror and related method
- Patent number 8,198,590
- Issue date Jun 12, 2012
- Honeywell International Inc.
- James Allen Cox
- G01 - MEASURING TESTING
Information Patent Grant
Integral topside vacuum package
- Patent number 8,188,561
- Issue date May 29, 2012
- Honeywell International Inc.
- Robert E. Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Micro fuel cell
- Patent number 8,153,285
- Issue date Apr 10, 2012
- Honeywell International Inc.
- Robert E. Higashi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
MOS low power sensor with sacrificial membrane
- Patent number 8,076,245
- Issue date Dec 13, 2011
- Honeywell International Inc.
- Barrett E. Cole
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical impedance detectors for fluid analyzers
- Patent number 7,965,089
- Issue date Jun 21, 2011
- Honeywell International Inc.
- Ulrich Bonne
- G01 - MEASURING TESTING
Information Patent Grant
Transducer for high-frequency antenna coupling and related apparatu...
- Patent number 7,898,498
- Issue date Mar 1, 2011
- Honeywell International Inc.
- Robert Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integral topside vacuum package
- Patent number 7,875,944
- Issue date Jan 25, 2011
- Honeywell International Inc.
- Robert E. Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Conformal film micro-channels for a fluidic micro analyzer
- Patent number 7,703,313
- Issue date Apr 27, 2010
- Honeywell International Inc.
- Robert E. Higashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas sensor
- Patent number 7,628,907
- Issue date Dec 8, 2009
- Honeywell International Inc.
- Yuandong Gu
- G01 - MEASURING TESTING
Information Patent Grant
Thermal vacuum gauge
- Patent number 7,613,586
- Issue date Nov 3, 2009
- Honeywell International Inc.
- Robert E. Higashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LOW LOSS SILICON NITRIDE AND WAVEGUIDES COMPRISING LOW LOSS SILICON...
- Publication number 20240079228
- Publication date Mar 7, 2024
- Quantinuum LLC
- Christopher John Carron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMOPILE-BASED FLOW SENSING DEVICE
- Publication number 20230358586
- Publication date Nov 9, 2023
- Honeywell International Inc.
- Robert Higashi
- G01 - MEASURING TESTING
Information Patent Application
THROUGH SILICON VIA FABRICATION
- Publication number 20220406659
- Publication date Dec 22, 2022
- Quantinuum LLC
- Robert Edward Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THROUGH SILICON VIA FABRICATION
- Publication number 20210082759
- Publication date Mar 18, 2021
- HONEYWELL INTERNATIONAL INC.
- Robert Edward Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMOPILE-BASED FLOW SENSING DEVICE
- Publication number 20200370938
- Publication date Nov 26, 2020
- Honeywell Internatinal Inc.
- Robert Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THROUGH SILICON VIA FABRICATION
- Publication number 20200365459
- Publication date Nov 19, 2020
- HONEYWELL INTERNATIONAL INC.
- Robert E. Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Airflow Sensor with Gas Composition Correction
- Publication number 20190285453
- Publication date Sep 19, 2019
- HONEYWELL INTERNATIONAL INC.
- Robert Higashi
- G01 - MEASURING TESTING
Information Patent Application
ELECTROCHEMICAL GAS SENSOR CONSTRUCTED WITH MEMS FABRICATION TECHNO...
- Publication number 20190137440
- Publication date May 9, 2019
- HONEYWELL INTERNATIONAL INC.
- Scott Edward BECK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPACT GAS SENSOR INCLUDING A MEMS ELEMENT HAVING CAPILLARIES TO F...
- Publication number 20180372675
- Publication date Dec 27, 2018
- HONEYWELL INTERNATIONAL INC.
- Richard Wade
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROBUST SENSING FILM FOR FIRE GASES
- Publication number 20180164239
- Publication date Jun 14, 2018
- HONEYWELL INTERNATIONAL INC.
- Robert E. Higashi
- G01 - MEASURING TESTING
Information Patent Application
AIRFLOW SENSOR WITH THERMAL CONDUCTIVITY & DIFFUSIVITY SENSING
- Publication number 20180143051
- Publication date May 24, 2018
- HONEYWELL INTERNATIONAL INC.
- Ian Bentley
- G01 - MEASURING TESTING
Information Patent Application
INFRARED IMAGER
- Publication number 20140312230
- Publication date Oct 23, 2014
- Honeywell International Inc.
- Barrett E. Cole
- G01 - MEASURING TESTING
Information Patent Application
SENSOR TEMPERATURE SENSING DEVICE
- Publication number 20140161153
- Publication date Jun 12, 2014
- Honeywell International Inc.
- Barrett E. Cole
- G01 - MEASURING TESTING
Information Patent Application
DEVICES, METHODS, AND SYSTEMS FOR WAFER BONDING
- Publication number 20120112348
- Publication date May 10, 2012
- Honeywell International Inc.
- Robert Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR ETCHING A DIAPHRAGM PRESSURE SENSOR
- Publication number 20120104521
- Publication date May 3, 2012
- Honeywell International Inc.
- Robert Higashi
- G01 - MEASURING TESTING
Information Patent Application
THERMAL CONDUCTIVITY DETECTORS
- Publication number 20120024043
- Publication date Feb 2, 2012
- Honeywell International Inc.
- Adam D. McBrady
- G01 - MEASURING TESTING
Information Patent Application
SENSOR TEMPERATURE SENSING DEVICE
- Publication number 20110317739
- Publication date Dec 29, 2011
- Honeywell International, Inc.
- Barrett E. Cole
- G01 - MEASURING TESTING
Information Patent Application
PASSIVE INFRARED IMAGER
- Publication number 20110279680
- Publication date Nov 17, 2011
- Honeywell International Inc.
- Barrett E. Cole
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
HIGH PERFORMANCE DETECTION PIXEL
- Publication number 20110267322
- Publication date Nov 3, 2011
- Honeywell International Inc.
- Barrett E. Cole
- G01 - MEASURING TESTING
Information Patent Application
INTEGRAL TOPSIDE VACUUM PACKAGE
- Publication number 20110070401
- Publication date Mar 24, 2011
- Honeywell International Inc.
- Robert E. Higashi
- G01 - MEASURING TESTING
Information Patent Application
A THERMAL PUMP
- Publication number 20100239436
- Publication date Sep 23, 2010
- Honeywell International Inc.
- Ulrich Bonne
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATION OF MEMS AND CMOS DEVICES ON A CHIP
- Publication number 20100140670
- Publication date Jun 10, 2010
- Honeywell International Inc.
- Andy Peczalski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH REFLECTANCE TERAHERTZ MIRROR AND RELATED METHOD
- Publication number 20100108891
- Publication date May 6, 2010
- Honeywell International Inc.
- James Allen Cox
- G02 - OPTICS
Information Patent Application
MICRO DISCHARGE DEVICE CAPABLE OF LOW VOLTAGE DISCHARGES IN A VARIE...
- Publication number 20100045159
- Publication date Feb 25, 2010
- Honeywell International Inc.
- Adam Dewey McBrady
- G01 - MEASURING TESTING
Information Patent Application
MOS LOW POWER SENSOR WITH SACRIFICAL MEMBRANE
- Publication number 20090283759
- Publication date Nov 19, 2009
- Honeywell International Inc.
- Barrett E. Cole
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROELECTROMECHANICAL LAMELLAR GRATING
- Publication number 20090279172
- Publication date Nov 12, 2009
- Robert E. Higashi
- G02 - OPTICS
Information Patent Application
TRANSDUCER FOR HIGH-FREQUENCY ANTENNA COUPLING AND RELATED APPARATU...
- Publication number 20090237320
- Publication date Sep 24, 2009
- Honeywell International Inc.
- Robert Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS DEVICE AND METHOD OF MAKING SAME
- Publication number 20090212386
- Publication date Aug 27, 2009
- Honeywell International Inc.
- Jeff A. Ridley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHEMICAL IMPEDANCE DETECTORS FOR FLUID ANALYZERS
- Publication number 20090184724
- Publication date Jul 23, 2009
- Honeywell International Inc.
- Ulrich Bonne
- G01 - MEASURING TESTING
Information Patent Application
Shell flow sensor
- Publication number 20090044620
- Publication date Feb 19, 2009
- Honeywell International Inc.
- Robert E. Higashi
- G01 - MEASURING TESTING

Robert E. Higashi

Person

Patents Grantslast 30 patents

Thermopile-based flow sensing device

Through silicon via fabrication

Thermopile-based flow sensing device

Through silicon via fabrication

Compact gas sensor including a MEMS element having capillaries to f...

Electrochemical gas sensor constructed with MEMS fabrication techno...

Through silicon via fabrication

Thermophile-based flow sensing device

Airflow sensor with gas composition correction

Robust sensing film for fire gases

Airflow sensor with thermal conductivity and diffusivity sensing

Sensor temperature sensing device

Infrared imager

Thermal conductivity detectors

Sensor temperature sensing device

Method and system for etching a diaphragm pressure sensor

Method for wafer bonding using gold and indium

High performance detection pixel

Integration of MEMS and CMOS devices on a chip

Micro discharge device capable of low voltage discharges in a varie...

High reflectance terahertz mirror and related method

Integral topside vacuum package

Micro fuel cell

MOS low power sensor with sacrificial membrane

Chemical impedance detectors for fluid analyzers

Transducer for high-frequency antenna coupling and related apparatu...

Integral topside vacuum package

Conformal film micro-channels for a fluidic micro analyzer

Gas sensor

Thermal vacuum gauge

Patents Applicationslast 30 patents

LOW LOSS SILICON NITRIDE AND WAVEGUIDES COMPRISING LOW LOSS SILICON...

THERMOPILE-BASED FLOW SENSING DEVICE

THROUGH SILICON VIA FABRICATION

THROUGH SILICON VIA FABRICATION

THERMOPILE-BASED FLOW SENSING DEVICE

THROUGH SILICON VIA FABRICATION

Airflow Sensor with Gas Composition Correction

ELECTROCHEMICAL GAS SENSOR CONSTRUCTED WITH MEMS FABRICATION TECHNO...

COMPACT GAS SENSOR INCLUDING A MEMS ELEMENT HAVING CAPILLARIES TO F...

ROBUST SENSING FILM FOR FIRE GASES

AIRFLOW SENSOR WITH THERMAL CONDUCTIVITY & DIFFUSIVITY SENSING

INFRARED IMAGER

SENSOR TEMPERATURE SENSING DEVICE

DEVICES, METHODS, AND SYSTEMS FOR WAFER BONDING

METHOD AND SYSTEM FOR ETCHING A DIAPHRAGM PRESSURE SENSOR

THERMAL CONDUCTIVITY DETECTORS

SENSOR TEMPERATURE SENSING DEVICE

PASSIVE INFRARED IMAGER

HIGH PERFORMANCE DETECTION PIXEL

INTEGRAL TOPSIDE VACUUM PACKAGE

A THERMAL PUMP

INTEGRATION OF MEMS AND CMOS DEVICES ON A CHIP

HIGH REFLECTANCE TERAHERTZ MIRROR AND RELATED METHOD

MICRO DISCHARGE DEVICE CAPABLE OF LOW VOLTAGE DISCHARGES IN A VARIE...

MOS LOW POWER SENSOR WITH SACRIFICAL MEMBRANE

MICROELECTROMECHANICAL LAMELLAR GRATING

TRANSDUCER FOR HIGH-FREQUENCY ANTENNA COUPLING AND RELATED APPARATU...

MEMS DEVICE AND METHOD OF MAKING SAME

CHEMICAL IMPEDANCE DETECTORS FOR FLUID ANALYZERS

Shell flow sensor