Robert E. LARSON

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Mound, MN, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for scanning an object through a fluid stream
- Patent number 10,020,207
- Issue date Jul 10, 2018
- Tel FSI, Inc.
- Mark Goluch
- B08 - CLEANING
Information Patent Grant
Apparatus and method for scanning an object through a fluid spray
- Patent number 9,321,087
- Issue date Apr 26, 2016
- TFL FSI, Inc.
- Mark Goluch
- B08 - CLEANING
Information Patent Grant
Reduced footprint tool for automated processing of microelectronic...
- Patent number 7,134,827
- Issue date Nov 14, 2006
- FSI International, Inc.
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced footprint tool for automated processing of microelectronic...
- Patent number 6,979,165
- Issue date Dec 27, 2005
- FSI International, Inc.
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID STREAM
- Publication number 20160276182
- Publication date Sep 22, 2016
- TEL FSI, Inc.
- Mark GOLUCH
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID SPRAY
- Publication number 20150068560
- Publication date Mar 12, 2015
- TEL FSI, Inc.
- Mark GOLUCH
- B08 - CLEANING
Information Patent Application
Reduced footprint tool for automated processing of microelectronic...
- Publication number 20050063799
- Publication date Mar 24, 2005
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced footprint tool for automated processing of microelectronic...
- Publication number 20030091410
- Publication date May 15, 2003
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS