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Robert F. Antrim
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Chalfont, PA, US
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Patents Grants
last 30 patents
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Patent Grant
Chemical mechanical polishing pad
Patent number
7,438,636
Issue date
Oct 21, 2008
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Mary Jo Kulp
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Chemical mechanical polishing pad
Publication number
20080153395
Publication date
Jun 26, 2008
Mary Jo Kulp
B24 - GRINDING POLISHING