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Robert Filman
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Menlo Park, CA, US
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last 30 patents
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Biologically based chamber matching
Patent number
8,723,869
Issue date
May 13, 2014
Tokyo Electron Limited
Sanjeev Kaushal
G05 - CONTROLLING REGULATING
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last 30 patents
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BIOLOGICALLY BASED CHAMBER MATCHING
Publication number
20140304196
Publication date
Oct 9, 2014
Sanjeev Kaushal
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
BIOLOGICALLY BASED CHAMBER MATCHING
Publication number
20120242667
Publication date
Sep 27, 2012
TOKYO ELECTRON LIMITED
Sanjeev Kaushal
G06 - COMPUTING CALCULATING COUNTING