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Robert FRANKEN
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Deurne, NL
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last 30 patents
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Patent Grant
Method for determining exposure settings, lithographic exposure app...
Patent number
8,208,118
Issue date
Jun 26, 2012
ASML Netherlands B.V.
David Warren Burry
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus lithographic apparatus, lithographi...
Patent number
7,869,022
Issue date
Jan 11, 2011
ASML Netherlands B.V.
Johan Maria Van Boxmeer
G02 - OPTICS
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last 30 patents
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Patent Application
Method for Determining Exposure Settings, Lithographic Exposure App...
Publication number
20090201473
Publication date
Aug 13, 2009
ASML NETHERLANDS B.V.
David Warren BURRY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection method and apparatus lithographic apparatus, lithographi...
Publication number
20090021708
Publication date
Jan 22, 2009
ASML NETHERLANDS B.V.
Johan Maria Van Boxmeer
G02 - OPTICS