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Robert G. Boehm
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Alameda, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for conditioning a polishing pad with sonic en...
Patent number
6,875,091
Issue date
Apr 5, 2005
Lam Research Corporation
Allan M. Radman
B24 - GRINDING POLISHING
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Patent Grant
Method and apparatus for stabilizing the process temperature during...
Patent number
6,224,461
Issue date
May 1, 2001
Lam Research Corporation
Robert G. Boehm
B24 - GRINDING POLISHING
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Patent Grant
Apparatus and method for performing end point detection on a linear...
Patent number
6,186,865
Issue date
Feb 13, 2001
Lam Research Corporation
Brian Thornton
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for conditioning a polishing pad with sonic en...
Publication number
20020086622
Publication date
Jul 4, 2002
Lam Research Corporation
Allan M. Radman
B24 - GRINDING POLISHING