Robert G. Carlson

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Fairfax, VT, US

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Patents Grantslast 30 patents

Information Patent Grant
Detection of foreign material on a substrate chuck
- Patent number 9,671,323
- Issue date Jun 6, 2017
- GLOBALFOUNDRIES Inc.
- Robert G. Carlson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DETECTION OF FOREIGN MATERIAL ON A SUBSTRATE CHUCK
- Publication number 20160327462
- Publication date Nov 10, 2016
- GLOBALFOUNDRIES INC.
- Robert G. Carlson
- G01 - MEASURING TESTING