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Robert G. Hostetler
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Maricopa, AZ, US
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for tuning a plasma reactor chamber
Patent number
6,960,887
Issue date
Nov 1, 2005
Tokyo Electron Limited
Eric J. Strang
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Electrostatically shielded radio frequency plasma apparatus and met...
Publication number
20040107561
Publication date
Jun 10, 2004
TOKYO ELECTRON LIMITED
Steven T. Fink
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method and apparatus for tuning a plasma reactor chamber
Publication number
20030227258
Publication date
Dec 11, 2003
Eric J. Strang
H01 - BASIC ELECTRIC ELEMENTS