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Robert G. Ozarski
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Livermore, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Portable laser beam monitor
Patent number
6,396,062
Issue date
May 28, 2002
Cymer, Inc.
Jesse D. Buck
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multiplexer for laser lithography
Patent number
6,229,639
Issue date
May 8, 2001
Cymer, Inc.
Robert G. Ozarski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reliable modular production quality narrow-band high REP rate excim...
Patent number
6,128,323
Issue date
Oct 3, 2000
Cymer, Inc.
David W. Myers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser chamber installation in and removal from a laser system housing
Patent number
6,111,907
Issue date
Aug 29, 2000
Cymer, Inc.
Robert G. Ozarski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser-illuminated stepper or scanner with energy sensor feedback
Patent number
6,067,306
Issue date
May 23, 2000
Cymer, Inc.
Richard L. Sandstrom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reliable. modular, production quality narrow-band KRF excimer laser
Patent number
5,991,324
Issue date
Nov 23, 1999
Cymer, Inc.
David S. Knowles
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser chamber with minimized acoustic and shock wave disturbances
Patent number
5,978,405
Issue date
Nov 2, 1999
Cymer, Inc.
Tibor Juhasz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for film thickness and refractive index determination
Patent number
4,909,631
Issue date
Mar 20, 1990
Raul Y. Tan
G01 - MEASURING TESTING
Information
Patent Grant
Characterization of semiconductor resist material during processing
Patent number
4,874,240
Issue date
Oct 17, 1989
Hoechst Celanese
Michael P. C. Watts
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Absorption measurements of materials
Patent number
4,857,738
Issue date
Aug 15, 1989
General Signal Corporation
David W. Myers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Large diffraction grating for gas discharge laser
Publication number
20020127497
Publication date
Sep 12, 2002
Daniel J. W. Brown
G02 - OPTICS
Information
Patent Application
DIFFRACTION GRATING AND FABRICATION TECHNIQUE FOR SAME
Publication number
20010003035
Publication date
Jun 7, 2001
ROBERT G. OZARSKI
G02 - OPTICS