Robert Gruenberger

Person

Nandlstadt, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Integration of stress decoupling and particle filter on a single wa...
- Patent number 11,505,450
- Issue date Nov 22, 2022
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Segmented stress decoupling via frontside trenching
- Patent number 11,247,895
- Issue date Feb 15, 2022
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration of stress decoupling and particle filter on a single wa...
- Patent number 10,899,604
- Issue date Jan 26, 2021
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical stress decoupling for microelectromechanical systems (ME...
- Patent number 10,843,916
- Issue date Nov 24, 2020
- Infineon Technologies AG
- Dirk Meinhold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Segmented stress decoupling via frontside trenching
- Patent number 10,807,862
- Issue date Oct 20, 2020
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system devices
- Patent number 8,993,394
- Issue date Mar 31, 2015
- Infineon Technologies AG
- Karlheinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system devices
- Patent number 8,318,581
- Issue date Nov 27, 2012
- Infineon Technologies AG
- Karl-Heinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system devices
- Patent number 8,125,046
- Issue date Feb 28, 2012
- Infineon Technologies AG
- Karl-Heinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Passive temperature compensation of silicon MEMS devices
- Patent number 7,889,030
- Issue date Feb 15, 2011
- Infineon Technologies AG
- Florian Schoen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATION OF STRESS DECOUPLING AND PARTICLE FILTER ON A SINGLE WA...
- Publication number 20210032097
- Publication date Feb 4, 2021
- INFINEON TECHNOLOGIES AG
- Florian BRANDL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEGMENTED STRESS DECOUPLING VIA FRONTSIDE TRENCHING
- Publication number 20200346922
- Publication date Nov 5, 2020
- INFINEON TECHNOLOGIES AG
- Florian BRANDL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATION OF STRESS DECOUPLING AND PARTICLE FILTER ON A SINGLE WA...
- Publication number 20200331748
- Publication date Oct 22, 2020
- INFINEON TECHNOLOGIES AG
- Florian BRANDL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEGMENTED STRESS DECOUPLING VIA FRONTSIDE TRENCHING
- Publication number 20200317508
- Publication date Oct 8, 2020
- INFINEON TECHNOLOGIES AG
- Florian BRANDL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICAL STRESS DECOUPLING FOR MICROELECTROMECHANICAL SYSTEMS (ME...
- Publication number 20200283286
- Publication date Sep 10, 2020
- INFINEON TECHNOLOGIES AG
- Dirk MEINHOLD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electromechanical System Devices
- Publication number 20130330870
- Publication date Dec 12, 2013
- INFINEON TECHNOLOGIES AG
- Karlheinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electromechanical System Devices
- Publication number 20120061734
- Publication date Mar 15, 2012
- INFINEON TECHNOLOGIES AG
- Karl-Heinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PASSIVE TEMPERATURE COMPENSATION OF SILICON MEMS DEVICES
- Publication number 20100032789
- Publication date Feb 11, 2010
- INFINEON TECHNOLOGIES AG
- Florian Schoen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electromechanical System Devices
- Publication number 20090302415
- Publication date Dec 10, 2009
- Karl-Heinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Robert Gruenberger

Person

Patents Grantslast 30 patents

Integration of stress decoupling and particle filter on a single wa...

Segmented stress decoupling via frontside trenching

Integration of stress decoupling and particle filter on a single wa...

Mechanical stress decoupling for microelectromechanical systems (ME...

Segmented stress decoupling via frontside trenching

Micro-electromechanical system devices

Micro-electromechanical system devices

Micro-electromechanical system devices

Passive temperature compensation of silicon MEMS devices

Patents Applicationslast 30 patents

INTEGRATION OF STRESS DECOUPLING AND PARTICLE FILTER ON A SINGLE WA...

SEGMENTED STRESS DECOUPLING VIA FRONTSIDE TRENCHING

INTEGRATION OF STRESS DECOUPLING AND PARTICLE FILTER ON A SINGLE WA...

SEGMENTED STRESS DECOUPLING VIA FRONTSIDE TRENCHING

MECHANICAL STRESS DECOUPLING FOR MICROELECTROMECHANICAL SYSTEMS (ME...

Micro-Electromechanical System Devices

Micro-Electromechanical System Devices

PASSIVE TEMPERATURE COMPENSATION OF SILICON MEMS DEVICES

Micro-Electromechanical System Devices