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Vacuum assembly for an ion implanter system
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Patent number 10,269,537
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Issue date Apr 23, 2019
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Varian Semiconductor Equipment Associates, Inc.
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Robert H. Bettencourt
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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SiC coating in an ion implanter
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Patent number 9,793,086
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Issue date Oct 17, 2017
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Varian Semiconductor Equipment Associates, Inc.
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Robert J. Mason
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H01 - BASIC ELECTRIC ELEMENTS
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SiC coating in an ion implanter
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Patent number 9,384,937
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Issue date Jul 5, 2016
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Varian Semiconductor Equipment Associates, Inc.
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Robert J. Mason
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H01 - BASIC ELECTRIC ELEMENTS
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Gate valve with improved seal arrangement
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Patent number 9,068,657
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Issue date Jun 30, 2015
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Varian Semiconductor Equipment Associates, Inc.
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Steven C. Borichevsky
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...