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Robert-Han Munnig Schmidt
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Hapert, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,391,499
Issue date
Jun 24, 2008
ASML Netherlands B.V.
Robert-Han Munnig Schmidt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic apparatus, radiation supply and device manufacturing m...
Publication number
20070222961
Publication date
Sep 27, 2007
ASML NETHERLANDS B.V.
Robert-Han Munnig Schmidt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070162781
Publication date
Jul 12, 2007
ASML NETHERLANDS B.V.
Huibert Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070150779
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Huibert Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20050286039
Publication date
Dec 29, 2005
ASML Netherlands B.V.
Robert-Han Munnig Schmidt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic positioning device and device manufacturing method
Publication number
20050200826
Publication date
Sep 15, 2005
ASML NETHERLANDS B.V.
Robert-Han Munnig Schmidt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Positioning device
Publication number
20050200825
Publication date
Sep 15, 2005
ASML NETHERLANDS B.V.
Robert-Han Munnig Schmidt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Movable stage system, lithographic apparatus, and device manufactur...
Publication number
20050099616
Publication date
May 12, 2005
ASML NETHERLANDS B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY