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Robert Haney
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Mountain View, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Sloped substrate support
Patent number
6,395,363
Issue date
May 28, 2002
Applied Materials, Inc.
David S. Ballance
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTS
Publication number
20140076354
Publication date
Mar 20, 2014
QUANTUM GLOBAL TECHNOLOGIES LLC
Brian T. West
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Removing Residues from Substrate Processing Components
Publication number
20120107520
Publication date
May 3, 2012
Brian T. West
B08 - CLEANING
Information
Patent Application
REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTS
Publication number
20080092806
Publication date
Apr 24, 2008
APPLIED MATERIALS, INC.
Brian T. West
B08 - CLEANING
Information
Patent Application
Refurbishment of a coated chamber component
Publication number
20050238807
Publication date
Oct 27, 2005
APPLIED MATERIALS, INC.
Yixing Lin
B08 - CLEANING