Robert Hefty

Person

Femont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for verifying gas flow rates from a gas supply system into...
- Patent number 9,234,775
- Issue date Jan 12, 2016
- Lam Research Corporation
- Dean J. Larson
- G05 - CONTROLLING REGULATING
Information Patent Grant
Silicon on insulator etch
- Patent number 8,906,248
- Issue date Dec 9, 2014
- Lam Research Corporation
- Siyi Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bi-layer, tri-layer mask CD control
- Patent number 8,394,722
- Issue date Mar 12, 2013
- Lam Research Corporation
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for low-K dielectric etch with reduced damage
- Patent number 8,236,188
- Issue date Aug 7, 2012
- Lam Research Corporation
- Bing Ji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for dielectric material removal between conductive lines
- Patent number 8,114,780
- Issue date Feb 14, 2012
- Lam Research Corporation
- Mayumi Block
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Recipe report card framework and methods thereof
- Patent number 7,558,641
- Issue date Jul 7, 2009
- Lam Research Corporation
- Chung-Ho Huang
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Methods for removing black silicon and black silicon carbide from s...
- Patent number 7,291,286
- Issue date Nov 6, 2007
- Lam Research Corporation
- Enrico Magni
- B08 - CLEANING
Information Patent Grant
Methods for protecting silicon or silicon carbide electrode surface...
- Patent number 7,226,869
- Issue date Jun 5, 2007
- Lam Research Corporation
- Kenji Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR VERIFYING GAS FLOW RATES FROM A GAS SUPPLY SYSTEM INTO...
- Publication number 20140033828
- Publication date Feb 6, 2014
- LAM RESEARCH CORPORATION
- Dean J. Larson
- G01 - MEASURING TESTING
Information Patent Application
SILICON ON INSULATOR ETCH
- Publication number 20130149869
- Publication date Jun 13, 2013
- LAM RESEARCH CORPORATION
- Siyi LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR LOW-K DIELECTRIC ETCH WITH REDUCED DAMAGE
- Publication number 20100261352
- Publication date Oct 14, 2010
- LAM RESEARCH CORPORATION
- Bing Ji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DIELECTRIC MATERIAL REMOVAL BETWEEN CONDUCTIVE LINES
- Publication number 20100248485
- Publication date Sep 30, 2010
- LAM RESEARCH CORPORATION
- Mayumi Block
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BI-LAYER, TRI-LAYER MASK CD CONTROL
- Publication number 20100108264
- Publication date May 6, 2010
- LAM RESEARCH CORPORATION
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECIPE REPORT CARD FRAMEWORK AND METHODS THEREOF
- Publication number 20080244400
- Publication date Oct 2, 2008
- Chung-Ho Huang
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods for verifying gas flow rates from a gas supply system into...
- Publication number 20070021935
- Publication date Jan 25, 2007
- Dean J. Larson
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods for removing black silicon and black silicon carbide from s...
- Publication number 20060157448
- Publication date Jul 20, 2006
- Lam Research Corporation
- Enrico Magni
- B08 - CLEANING
Information Patent Application
Methods for protecting silicon or silicon carbide electrode surface...
- Publication number 20060091104
- Publication date May 4, 2006
- Kenji Takeshita
- B08 - CLEANING

Robert Hefty

Person

Patents Grantslast 30 patents

Methods for verifying gas flow rates from a gas supply system into...

Silicon on insulator etch

Bi-layer, tri-layer mask CD control

Method for low-K dielectric etch with reduced damage

Method for dielectric material removal between conductive lines

Recipe report card framework and methods thereof

Methods for removing black silicon and black silicon carbide from s...

Methods for protecting silicon or silicon carbide electrode surface...

Patents Applicationslast 30 patents

METHODS FOR VERIFYING GAS FLOW RATES FROM A GAS SUPPLY SYSTEM INTO...

SILICON ON INSULATOR ETCH

METHOD FOR LOW-K DIELECTRIC ETCH WITH REDUCED DAMAGE

METHOD FOR DIELECTRIC MATERIAL REMOVAL BETWEEN CONDUCTIVE LINES

BI-LAYER, TRI-LAYER MASK CD CONTROL

RECIPE REPORT CARD FRAMEWORK AND METHODS THEREOF

Methods for verifying gas flow rates from a gas supply system into...

Methods for removing black silicon and black silicon carbide from s...

Methods for protecting silicon or silicon carbide electrode surface...