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Robert Hepburn
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Tualatin, OR, US
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last 30 patents
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Patent Grant
Film for copper diffusion barrier
Patent number
7,163,889
Issue date
Jan 16, 2007
Novellus Systems, Inc.
Yongsik Yu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Film for copper diffusion barrier
Patent number
6,967,405
Issue date
Nov 22, 2005
Yongsik Yu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Novel film for copper diffusion barrier
Publication number
20060019486
Publication date
Jan 26, 2006
Novellus Systems, Inc.
Yongsik Yu
H01 - BASIC ELECTRIC ELEMENTS