Robert Innes

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The Sea Ranch, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Real-time prediction of and correction of proximity resist heating...
- Patent number 6,720,565
- Issue date Apr 13, 2004
- Applied Materials, Inc.
- Robert Innes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for real-time correction of resist heating in...
- Patent number 6,420,717
- Issue date Jul 16, 2002
- Applied Materials, Inc.
- Sergey Babin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods to predict and correct resist heating during lithography
- Patent number 6,379,851
- Issue date Apr 30, 2002
- Applied Materials, Inc.
- Robert Innes
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Real-time prediction of proximity resist heating and correction of...
- Patent number 6,373,071
- Issue date Apr 16, 2002
- Applied Materials, Inc.
- Robert Innes
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Minimization of electron fogging in electron beam lithography
- Patent number 6,326,635
- Issue date Dec 4, 2001
- Etec Systems, Inc.
- Robert Innes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for run-time correction of proximity effects i...
- Patent number 5,847,959
- Issue date Dec 8, 1998
- Etec Systems, Inc.
- Lee H. Veneklasen
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Real-time prediction of and correction of proximity resist heating...
- Publication number 20020148978
- Publication date Oct 17, 2002
- APPLIED MATERIALS, INC.
- Robert Innes
- B82 - NANO-TECHNOLOGY