Robert J. Horner

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Severn, MD, US

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Patents Applicationslast 30 patents

Information Patent Application
Low charging dielectric for capacitive MEMS devices and method of m...
- Publication number 20060138604
- Publication date Jun 29, 2006
- NORTHROP GRUMMAN CORPORATION
- Christopher F. Kirby
- B81 - MICRO-STRUCTURAL TECHNOLOGY