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LOW NOISE PIEZOELECTRIC SENSORS
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QUALCOMM TECHNOLOGIES, INC.
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MEMS PROCESS POWER
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Publication date Dec 28, 2023
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QUALCOMM TECHNOLOGIES INC.
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Publication date Oct 19, 2023
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The Regents of the University of Michigan
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Karl Grosh
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ROBUST MEMS MICROPHONE
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Publication date Jun 23, 2022
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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PIEZOELECTRIC MEMS MICROPHONE
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Publication number 20210273152
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Publication date Sep 2, 2021
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The Regents of the University of Michigan
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Karl Grosh
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ROBUST MEMS MICROPHONE
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Publication number 20210211809
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Publication date Jul 8, 2021
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Vesper Technologies, Inc.
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Craig Core
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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PIEZOELECTRIC MEMS MICROPHONE
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Publication number 20200148532
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Publication date May 14, 2020
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The Regents of the University of Michigan
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Karl Grosh
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Plate Spring
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Publication number 20190110132
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Publication date Apr 11, 2019
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Vesper Technologies Inc.
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Robert J Littrell
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B81 - MICRO-STRUCTURAL TECHNOLOGY