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Robert J. MacHugh
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Newburgh, NY, US
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last 30 patents
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Patent Application
METHOD AND SYSTEM FOR INTEGRATING EQUIPMENT INTEGRATION SOFTWARE, E...
Publication number
20060271223
Publication date
Nov 30, 2006
International Business Machines Corporation
Karl Gartland
G05 - CONTROLLING REGULATING
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Patent Application
HOST CONTROL FOR A VARIETY OF TOOLS IN SEMICONDUCTOR FABS
Publication number
20060025880
Publication date
Feb 2, 2006
International Business Machines Corporation
Padmavathi D. Chukka
G05 - CONTROLLING REGULATING